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This study details the measurement parameters obtained from a conductive silicon wafer featuring a platinum pattern. Utilizing a 10 mm aperture and a working distance of 7 mm, with Z positioned at 26 mm, precise metrics were gathered to analyze the conductivity and structural properties. The findings can provide insights into semiconductor behavior and the impact of patterning on electrical performance. This comprehensive evaluation allows for further development in microfabrication techniques and applications in electronic devices.
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eLiNE beam parameters All parameters were measured on a conducting Si wafer with Pt pattern using 10 mm aperture and 7 mm working distance (Z=26 mm),.