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Tecport E-beam Evaporator Process parameters.

Tecport E-beam Evaporator Process parameters. List of materials which have been evaporated:. METALS: Aluminium. Chromium. Gold. Titanium. Hafnium. Nickel. OXIDES: 1. Aluminium Oxide. 2. Silicon Dioxide. 3. Titanium Oxide. 4. Indium – Tin Oxide. Aluminium (Al).

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Tecport E-beam Evaporator Process parameters.

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  1. Tecport E-beam EvaporatorProcess parameters. List of materials which have been evaporated: • METALS: • Aluminium. • Chromium. • Gold. • Titanium. • Hafnium. • Nickel. OXIDES: 1. Aluminium Oxide. 2. Silicon Dioxide. 3. Titanium Oxide. 4. Indium – Tin Oxide.

  2. Aluminium (Al) Process parameter:

  3. Al - XRD Data:

  4. Chromium (Cr) Process parameter:

  5. Cr - XRD Data:

  6. Gold (Au) Process parameter:

  7. Au - XRD Data:

  8. Titanium (Ti) Process parameter:

  9. Ti - XRD Data:

  10. Ti - XPS Data: From XPS data shows that the atomic concentration of O2 is more on the surface and with depth it is decreasing and the atomic concentration of Tiis increasing with depth.

  11. Hafnium (Hf) Process parameter:

  12. Hf - XRD Data:

  13. Nickel (Ni) Process parameter:

  14. Ni - XRD Data (Before annealing):

  15. Ni - XRD Data (After annealing):

  16. Aluminium Oxide (Al203): Process parameter: ANALYSIS:

  17. Aluminium Oxide (Al203)with O2: Process parameter:

  18. ANALYSIS:

  19. Silicon Dioxide (SiO2): Process parameter: Silicon Dioxide (SiO2) with O2: Process parameter:

  20. ANALYSIS: SiO2 Vs. SiO2 with O2

  21. Titanium Oxide (TiO2): Process parameter:

  22. wavelength Vs. refractive index and extinction coefficient: ANALYSIS:

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