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Application examples

Application examples. Eötvös University Budapest and Technoorg Linda co-operation. SC-1000 SEMPrep. FEI Quanta 3D dual beam SEM. SURFACE POLISHING – Cu , SEM. SEM ETD image. EBSD IPF image. Mechanical polishing : 1µm ( without SEMPrep treatment ). SURFACE POLISHING – Cu , IPF.

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Application examples

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  1. Applicationexamples Eötvös University Budapest and Technoorg Linda co-operation SC-1000 SEMPrep FEI Quanta 3D dualbeam SEM

  2. SURFACE POLISHING – Cu, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)

  3. SURFACE POLISHING – Cu, IPF Kikuchipatterns EBSD IPF image Ar ion polishing: 10 kV 7° pretilt, 15 min, withrotation

  4. SURFACE POLISHING – Cu, IQ Ar ion polishing: 10 kV 7° pretilt, 15 min., withrotation IQ: 2090

  5. SEMPrepcut – Cu, SEM ETD images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 2.4 µm/min

  6. SEMPrepcut – Cu, IPF Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 2.4 µm/min IQ=3000

  7. SEMPrepcut – Cu, IPF Kikuchipatterns EBSD IQ=3000

  8. SEMPrepcut – Cu, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 2.4 µm/min IQ=3000

  9. SURFACE POLISHING – Al, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)

  10. SURFACE POLISHING – Al, IPF EBSD IPF image SEM ETD image Ar ion polishing: 10 kV 10° pretilt, 10 min, withrotation

  11. SURFACE POLISHING – Al, IQ Ar ion polishing: 10 kV 10° pretilt, 10 min., withrotation IQ: 2640

  12. SURFACE POLISHING – Al-Siwire, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)

  13. SURFACE POLISHING – Al-Siwire, IQ and IPF IQ=1054 EBSD IPF image Ar ion polishing: 10 kV 7° pretilt, 45 min, withrotation

  14. SEMPrepcut – Al-Siwire, SEM images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 1.8 µm/min

  15. SEMPrepcut – Al-Siwire, IPF Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.8 µm/min IQ=838

  16. SEMPrepcut– Al-Siwire, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.8 µm/min IQ=838

  17. SURFACE POLISHING – Ni, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)

  18. SURFACE POLISHING – Ni, IPF SEM ETD image EBSD IPF image Ar ion polishing: 10 kV 12° pretilt, 10 min, withrotation

  19. SURFACE POLISHING – Ni, IQ Ar ion polishing: 10 kV 12° pretilt, 10 min., withrotation IQ: 2741

  20. SEMPrepcut– Ni, IPF Arion beamenergy: 10 keV sample tilt 30o, oscillation: ± 30 deg. millingtime: 120 min, millingrate: 1.7 µm/min IQ=1863

  21. SEMPrepcut– Ni, IPF Kikuchipatterns EBSD IPF image

  22. SEMPrepcut– Ni, IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.7 µm/min IQ=1863

  23. SURFACE POLISHING – Fe, SEM SEM ETD image EBSD IPF image Mechanicalpolishing: 1µm (withoutSEMPreptreatment)

  24. SURFACE POLISHING – Fe, IPF EBSD IPF image SEM ETD image Ar ion polishing: 10 kV 7° pretilt, 26 min, withrotation

  25. SURFACE POLISHING – Fe, IQ Ar ion polishing: 10 kV 7° pretilt, 26 min., withrotation IQ: 1574

  26. SEMPrepcut – Si, SEM ETD image Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 60 min millingrate: 1.9 µm/min

  27. SEMPrepcut – non-conductivesamples: pyrite SEM ETD images Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 60 min millingrate: 1.6 µm/min

  28. SEMPrepcut – non-conductivesample: limestone SEM ETD images, lowvacuummode Arion beamenergy: 10 keV sample tilt 30o oscillation: ± 30 deg. millingtime: 120 min millingrate: 1.6 µm/min

  29. SEMPrepcut– limestone, IPF and IQ Arion beamenergy: 10 keV sample tilt 30o, millingtime: 120 min, millingrate: 1.6 µm/min EBSD imagingatlowvacuum, usingnon-conductivesample

  30. SURFACE POLISHING – Cu, Gentle Mill vs. SEMPrep Cusample, surfacepolishingcomparison

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