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歐傑電子分析 儀 ( Auger Electron Spectroscopy ; AES )

歐傑電子分析 儀 ( Auger Electron Spectroscopy ; AES ). 授課老師 : 吳坤憲 學生 : 湯迦鈞. OUTLINE. Introduction How It Works Application Where can use References. Introduction.

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歐傑電子分析 儀 ( Auger Electron Spectroscopy ; AES )

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  1. 歐傑電子分析儀(Auger ElectronSpectroscopy ;AES) 授課老師:吳坤憲 學生:湯迦鈞

  2. OUTLINE • Introduction • How It Works • Application • Where can use • References

  3. Introduction • Auger Electron Spectroscopy (Auger spectroscopy or AES) was developed in the late 1960's, deriving its name from the effect first observed by Pierre Auger, a French Physicist, in the mid-1920's.

  4. Introduction

  5. How It Works

  6. UHV Environment • The surface analysis necessitates the use of a UHV environmentbecause the equivalent of one monolayer of gas impinges on a surface every second in a vacuum of 10–6 torr. • Generally, the background pressure is reduced to the low 10–10-torr range in order to minimize the influence of residual gases in surface analysis measurements.

  7. Electron Gun

  8. Electron Energy Analyzer-CMA

  9. Electron Energy Analyzer-SSA

  10. depth profiling

  11. Application • 個人電腦硬碟磁片的磁性薄膜分析

  12. Application • 磁頭的磁性材料

  13. Application

  14. Where can use • 成功大學 • 連絡方式:指導教授:陳引幹 教授 • TEL: (06)275757562947 • E-mail:Ingann@mail.ncku.edu.tw • 技 術 員:李宗雄助教 • TEL: 0911-153075 • E-mail:pshunterbabu@gmail.com • 服務項目: 一.Auger Line Scan 二.Auger Mapping 三.Depth profile 四.Fracture stage(AES) • 收費標準: • 一.AES分析:3000元/小時 • 二.AES Depth Profile 3500元/小時 • 三.AES Mapping 每次3000元 • 四.Fracture stage 每次1000元

  15. Where can use • 清華大學 • 連絡方式:指導教授:韓建中 教授 • TEL:(03)5715131Ext.35649  FAX:(03)5722366 • E-MAIL:cchan@mx.nthu.edu.tw • 儀器管理員:謝瑞蘭 小姐 • TEL:(03)5715131Ext.33432  Fax:(03)5722915 • E-MAIL:hrxps@www.nscric.nthu.edu.tw • 服務項目: • XPS 全能譜圖(XPS survey)XPS 單元素能譜圖 (XPS multiplex) • XPS 元素影像掃瞄(XPS mapping)XPS元素縱深分佈(XPS depth profile) • Auger 全能譜圖 (Auger survey)Auger 單元素能譜圖 (Auger multiplex) • Auger 元素影像掃瞄 (Auger line scan and Auger mapping)Auger 元素縱深分佈(Auger depth profile) • 收費標準:收費標準為每小時3000元 (包含樣品處理時間,樣品抽真空時間及關機等待的時間),若需開電荷補償器則為每小時4000元列,印數據每張10元。

  16. References • http://www.jhu.edu/~chem/fairbr/surfacelab/aes.html • http://www.ncku.edu.tw/~facility/facility/index.htm • http://www.materialsnet.com.tw/AD/ADImages/AAADDD/MCLM100/download/equipment/SA/u-ESCA/u-ESCA001.pdf • http://nscric.web.nthu.edu.tw/files/15-1006-197,c81-1.php

  17. Thanksforyourattention

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