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HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION

HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION. Timeline of MEMS and MEME. M icro- E lectrical- M echanical S ystems. M icro- E lectrical- M echanical E quipments. Same fabrication techniques used for electrical VLSI . So what are MEMS?. Microelectromechanical systems (MEMS)

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HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION

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  1. HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION

  2. Timeline of MEMS and MEME Micro-Electrical-Mechanical Systems Micro-Electrical-Mechanical Equipments Same fabrication techniques used for electrical VLSI

  3. So what are MEMS? Microelectromechanical systems (MEMS) • small integrated devices or systems that combine electrical and mechanical components • range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any number, from a few to millions, in a particular system • MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and springs to devices.

  4. Timeline of MEMS

  5. Timeline of MEMS Piezo Pressure Sensors

  6. Timeline of MEMS

  7. Timeline of MEMS Surface Micromachining Sensors and MicroMirror

  8. Timeline of MEME Side Drive Motor Electro Comb Drive Actuator Commercial Polysilicon Surface Micromachining ADXL and DRIE of SOI

  9. Timeline of MEME BioMEMS and Optical MEMS

  10. What is the Next Big MEMS Things? Optical MEMS are well suited for implantation in MEMS • This will lower the cost and also add functionality • Promising application areas include

  11. MEMS Patents issued by year Figure 1. Worldwide and U. S. patents on MEMS as a function of year. The total number of patents in this distribution is 861, of which 247 are from the U. S.

  12. Patent Activity

  13. MEMS Folks like bugs?!

  14. First Commercial Product

  15. MEMS – Become Optical • Reflective metal • Gold • Aluminum

  16. Optical MEMS become Commercial

  17. DLP System

  18. 2x2 Optical Switch Cross State Bar State

  19. NxN Optical Link

  20. 3D Optical Switch

  21. Agilent Bubble Switch

  22. MEMS Add/Drop

  23. Sensor: Spectrometer on Chip

  24. References • http://mems.colorado.edu/c1.res.ppt/ • http://www.csa.com/hottopics/mems/abstracts_s.php • http://www.aero.org/publications/helvajian/helvajian-1.html • Manchester University Experimental Transistor Computer 1953 • http://www.computer50.org/kgill/transistor/trans1.gif • Close-up of the Experimental Transistor Computer • http://www.computer50.org/kgill/transistor/trans2.gif

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