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Modeled Effective Dielectric Constants

Explore the relationship between bulk dielectric constants and effective dielectric constants in 50nm SiC and Cu interconnects. Findings show variations based on bulk dielectric values, impacting efficiency. This study uses FEM analysis by M-H. Tsai and B. Havemann.

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Modeled Effective Dielectric Constants

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  1. Modeled Effective Dielectric Constants Bulk Dielectric 50nm SiC k1 Cu Cu 0.26um 0.14um 50nm SiC Bulk Dielectric If bulk dielectric = 2.6 then keff = 2.94 If bulk dielectric = 2.2 then keff = 2.57 If bulk dielectric = 1.5 then keff = 1.96 If bulk dielectric = 1.0 (Air) then keff = 1.5 Raphel FEM provided by M-H Tsai and B. Havemann

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