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Active MEMS for Wireless and Optical Space Communications

NASA Space Communications Symposium. Active MEMS for Wireless and Optical Space Communications. Principal Investigators: Frank Merat, Stephen Phillips Task Number: NAG3-2578 Case Western Reserve University September 18, 2002.

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Active MEMS for Wireless and Optical Space Communications

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  1. NASA SpaceCommunications Symposium Active MEMS for Wireless and Optical Space Communications Principal Investigators: Frank Merat, Stephen Phillips Task Number: NAG3-2578 Case Western Reserve University September 18, 2002

  2. Design MEMS focusing mirrors with electrostatic actuated pointing mechanisms. Develop batch microfabrication processes. Produce and test devices. start date 12/01/01. 100 m Active MEMS for Communications • Project Overview

  3. Enterprise Relevance: This technology has applications in access and proximity networks. Planetary exploration missions are the primary targets where: 1. Access networks are used for communications between satellites and surface vehicles. 2. Proximity networks are used for communications between surface vehicles. Impact: Mass produced MEMS based transmitters and receivers for optical links in proximity and access networks promise: 1. Reduced manufacturing costs 2. Reduced system mass Active MEMS for Communications • Enterprise Relevance and Impact

  4. 300 570 p 200 p tensile 100 MultiPoly Ñ m p Stress (MPa) Ñ 0 Ñ Ñ D D -100 615 D compressive -200 D -300 700 800 900 1000 1100 1200 as-deposited Annealing Temperature (C) Active MEMS for Communications • Milestones - Technical Accomplishments and Schedules Film Stress (MPa) 570 C 615 C Film Thickness (µm, from SiO2 interface)

  5. Active MEMS for Communications • Milestones - Technical Accomplishments and Schedules

  6. Active MEMS for Communications • Milestones - Technical Accomplishments and Schedules

  7. Active MEMS for Communications • Risks

  8. Phase one funding ended on budget. Phase two funding through March 2003. Student funding (1 graduate assistant) budgeted. Processing fees are thin. Active MEMS for Communications • Funding Issues

  9. Active MEMS for Communications • Future Plans

  10. Provide a list of all papers published and awards received. Active MEMS for Communications • Papers and Awards

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