Pre-layout prediction of interconnect manufacturability

1. Pre-layout prediction of interconnect manufacturability Phillip Christie University of Delaware USA Jose Pineda de Gyvez Philips Research Laboratories The Netherlands

2. Front end of design Front end of line Synthesis Silicon processes Floor planning Dielectric processes Placement Planarization Routing Metal processes Timing closure Yield Back end of design Back end of line BEOD and BEOL OptimizationThe BEBOP Project SLIP Tools (MATLAB WireTools) Technology file

3. Nets per cell (npc) Terminals per net (tpn) Netlist signature Netlist Floorplan Placement Routing Yield

4. Rent exponent Netlist Floorplan Placement Routing Yield

5. Wiring signature cube Netlist 1 Floorplan Placement 0.8 p Routing 0.6 6 4 6 5 4 Yield 2 3 2 tpn npc

6. Floorplan design Netlist Floorplan Placement Routing Yield

7. Site occupancy probability Netlist Floorplan Probability of occupancy Linear axes Placement Number of available sites Routing Yield

8. Model Development Wire length distribution Netlist Floorplan p=1.0 Placement 0.9 0.8 0.7 0.6 0.5 Routing Applications

9. Routing Model Netlist Floorplan Placement Routing Yield implemented with via blocking

10. Yield prediction Netlist Floorplan Placement Routing Yield

11. Netlist Floorplan Placement Routing Yield

12. wire length, l x=w wire width, w x=1.2w width of critical area = x-w x=1.5w defect size, x length of cut critical area = l Cut model Netlist Floorplan Placement Routing Yield

13. Bridge model Netlist wire overlap length, m Floorplan x=s Placement x=1.2s Routing x=1.5s Yield length of bridge critical area = m+x

14. Probability of Failure Netlist Floorplan Placement Routing = Defect size distribution X Sensitivity Probability of Failure Yield

15. 1 0.8 0.6 Sensitivity 0.4 0.2 0 3 0 1 2 3 Defect size -6 x 10 Cut sensitivity prediction Netlist Floorplan Placement Routing Yield

16. Bridge sensitivity prediction Netlist 1 Floorplan 0.8 0.6 Placement Sensitivity 0.4 Routing 0.2 0 0 1 2 3 Defect size -6 x 10 Yield

17. Layer 1 2 3 4 5 6 Cuts POFn (predicted) 2.92% 2.92% 2.91% 2.90% 0.61% 0.34% POFn (extracted) 2.80% 2.53% 2.09% 2.30% 0.49% 0.36% Bridges POFn (predicted) 1.14% 1.14% 1.13% 1.13% 0.21% 0.21% POFn (extracted) 1.82% 1.53% 1.17% 1.13% 0.28% 0.16% Theory versus experiment Netlist Floorplan Placement Routing Yield

18. Conclusions • Wiretools is a program development environment for interconnect analysis • Wiretools enables technology and design exploration (BEBOP) • Cut model easy to implement if wire length distribution known • Bridge model can be modeled using basic probability theory • Yield modeling is critical for interconnect geometry optimization

19. Acknowledgements • William Rey, Leo Sevat, Martijn Bennebroek • Philips Research Laboratories • National Science Foundation (CCR-9872159)