Nanoscience, Nanotechnology and Nanomanufacturing

1. Nanoscience, Nanotechnology and Nanomanufacturing Exciting new science and technology for the 21st century

2. Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering It has potential impact in electronics, health, energy, materials, and a wide variety of other application areas.

3. Single Hair Width = 0.1 mm How small are nanostructures? = 100 micrometers = 100,000 nanometers ! 1 nanometer = one billionth (10-9) meter

4. DNA 6,000 nanometers Red blood cell 3 nanometers Smaller still Hair .

5. How do we make nanostructures? How do we see nanostructures?

6. First,how do we make nanostructures? • Lithography • Self-assembly - physical or chemical

7. Lithography Mark Tuominen Mark Tuominen

8. Electron Beam Polymer film Silicon crystal Making a microscopic mask Nanoscopic Mask !

9. Lithography Patterned Several Times IBM Copper Wiring On a Computer Chip

10. ~10 nm SELF ASSEMBLY Block “B” Diblock Copolymer Block “A” PS PMMA Scale set by molecular size Ordered Phases 10% A 30% A 50% A 70% A 90% A

11. BASIC NANOPOROUS TEMPLATE PROCESS APPLICATIONS Deposition Template Etching Mask Remove polymer block within cylinders (UV or ebeam exposure; Acetic acid rinse) Nanoporous Membrane “A versatile, self-assembling, nanoscale lithographic system”

12. SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE PS/PMMA MW = 42,000 Array Period = 24 nm Pore Diameter = 14 nm

13. Nanowires Template Transfer Copolymer Template Separations & Sensors Patterned Media Glass Pillars FUNCTIONAL NANOARRAYS NIRT UMass Amherst Devices

14. 200 nm 100 nm 20 nm unfilled polymer template electrodeposited cobalt nanowires gold silicon NANOWIRE ARRAYS using ELECTRODEPOSITION 1 0 1 1 0 cobalt nanowires • ULTRA-HIGH DENSITY MAGNETIC DATA STORAGE 1.2 trillion wires/in2

15. LATERALLY-PATTERNED MEDIA vertically-oriented diblock copolymer film NO HOLES “patterned” nanoporous polymer template unexposed region of copolymer film HOLES “patterned” nanowire array

16. How do we see nanostructures? • A light microscope? • An electron microscope! • A scanning probe microscope!

17. TV screen eye electron beam electron source Light ! Television Set

18. Electron Beam DETECTOR SAMPLE Electron Microscope

19. Surface Scanning probe microscope Vibrating Cantilever

20. Image of Nickel Atoms

21. Pushing Atoms Around

22. The New UMass Nano Center Hierarchical?

23. Hierarchical Structures Example: google maps Earth -- countries -- states -- cities -- blocks -- houses -- rooms

24. Hierarchical Structures Examples in Nano: Biological Cell and Computer Chip In nanomanufacturing we are integrating "bottom up" self-assembly with "top down" lithography —Hierarchical Manufacturing!