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Basic principle judgment criteria

Guidelines for entry in clean room after occurrence of disaster. December 9, 2005 Semiconductor Equipment Association of Japan Service Committee. Basic principle judgment criteria

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Basic principle judgment criteria

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  1. Guidelines for entry in clean room after occurrence of disaster December 9, 2005 Semiconductor Equipment Association of Japan Service Committee Basic principle judgment criteria The following items are the criteria to judge, with a top priority placed on human life, whether entry in the room can be permitted or not. To make a final judgment, the opinions of the site supervisor, workers, and the customer’s task force shall be also confirmed and considered. However, the responsibility for supervising shall be placed on the customer. 1.Criteria for local environment (1) No evacuation advisory or instruction shall be issued from the local government. (2) Safety shall be ensured in access to the site. (3) In the case of earthquake, the possibility of aftershocks with the seismic intensity of 5 or more shall be less than 10% (based on the announcement of public institution). (4) There shall be accommodations near the site. (5) Some communication measures shall be ensured. 2.Criteria for entry in/exit from customer buildings (clean room, facility area, and others) (1) Entry in the building shall be requested from the task force (safety responsible person), not from the customer individuals. (2) For earthquake, if an earthquake with the seismic intensity of 6 or more occurs, 24 hours minimum shall have elapsed after the earthquake. (3) The exhaust systems for all gases such as general gases, acidic and alkaline gases, and organic gasses shall operate normally. (4) The air conditioning equipment shall operate normally, or the ventilation of the clean room shall be allowed. (5) The multiple values measured with the gas detectors shall be equal to or less than the safety standards in the clean room and the related locations. (6) The lighting equipment shall be lit normally. (7) The safety equipment (gas detector, fire alarm, etc.) shall operate normally in the clean room. (8) The escape routes including general view, passages, emergency exits, and other equipment shall be provided, and in-house broadcasting shall be also allowed. (9) Some appropriate protective aids shall be lendable, or can be prepared by each vendor. (10) Unnecessary materials shall be removed to ensure adequate passage and working area. (11) It shall be accepted in advance that the site supervisor suspends the work regardless of the customer’s judgment immediately when he/she feels danger of the work. (A top priority shall be placed on the judgment of the persons working in the clean room.)

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