Nanoscale Thermal Conductivity Measurement

1. Nanoscale Thermal Conductivity Measurement Daniel C. Ralph, Cornell University, ECCS 0335765 Experimental structure for thermal conductivity measurement on Mo/Si multilayers, Z. Li, T.Kodama, K. Goodson et al, Nano Letters., 12 (2012) 3121. 3 omega signals in thermal conductivity measurements. Target Nanoscale heaters down to 50 nm were fabricated by the combination of photolithography and e-beam lithography. Multiscaleheaters for separating in-plane and out-of-plane component of the thermal conductivitywere produced. Much improved lateral resolution compared was achieved with conventional 3ω measurements. Schematic of the side view. 10 µm Dr. Takashi Kodama, Prof. K. Goodson group, Mechanical Engineering Department, Stanford University; Work performed at Stanford Nanofabrication Facility