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This document outlines the high-level float process chamber system featuring essential components such as nitrogen dryers, various fluid reservoirs, and ion absorption chambers. It details processes including filling, washing, rinsing, and draining, emphasizing safety mechanisms including high and low-level floats. The system is equipped with advanced cleaning and drying functions to optimize efficiency. Global reach and on-site service capabilities enhance operational reliability and support for users in diverse environments.
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High Level Float Process Chamber HEAT(option) Nitrogen Dryer S5 S1 Fill S3 Wash S2 Rinse S3 RES. SENSOR S1 Drain S4 S5 Dry IAC S4 P1 S2 ( ) Low Level Float Closed Fluid Reservoir IONIC ABSORPTION CHAMBER S1
高液位浮标 清洗腔室 加热 选件 氮气干燥 S5 S1 注入 S3 清洗 S2 漂洗 S3 电阻率 探头 S1 排泄 S4 S5 干燥 IAC S4 P1 S2 ( ) 低液位浮标 封闭的溶剂槽 离子吸附 腔室 S1