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Mega II: System Diagram

Mega II: System Diagram. High Level Float. Process Chamber. HEAT (option). Nitrogen Dryer. S5. S1. Fill. S3. Wash. S2. Rinse. S3. RES. SENSOR. S1. Drain. S4. S5. Dry. IAC. S4. P1. S2. (. ). Low Level Float. Closed Fluid Reservoir. IONIC ABSORPTION CHAMBER. S1. 高液位浮标.

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Mega II: System Diagram

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  1. Mega II: System Diagram

  2. High Level Float Process Chamber HEAT(option) Nitrogen Dryer S5 S1 Fill S3 Wash S2 Rinse S3 RES. SENSOR S1 Drain S4 S5 Dry IAC S4 P1 S2 ( ) Low Level Float Closed Fluid Reservoir IONIC ABSORPTION CHAMBER S1

  3. 高液位浮标 清洗腔室 加热 选件 氮气干燥 S5 S1 注入 S3 清洗 S2 漂洗 S3 电阻率 探头 S1 排泄 S4 S5 干燥 IAC S4 P1 S2 ( ) 低液位浮标 封闭的溶剂槽 离子吸附 腔室 S1

  4. GLOBAL REACH AND ON-SITE SERVICE CAPABILITY

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