1. Moment arm Torsional hinge Actuation direction Mirror Perforated beams Recessed inner plate Cosine-shaped beams Perforated comb drive array Torsional micromirror. MEMS Design by: M. Last, K.S.J. Pister CAD/Simulation Tool idea design rough draft mathematic model - evaluation simulation of model Production Tools manufacturing measurement - sample Characterization Tools optical measurement prototype methods SUGAR: A MEMS Simulation Tool David Bindel, Jason V. Clark, David Garmire, Babak Jamshidi, Shyam Lakshmin, Jiawang Nie, Ningning ZhouAlice Agogino, Zhaojun Bai, James Demmel, Sanjay Govindjee, Ming Gu, Kristofer S.J. Pister http://www-bsac.eecs.berkeley.edu/cadtools/sugar Introduction: Software architecture: • Most MEMS designers use: • Most of the IC fabrication technology • Little of the simulation technology • Our goal: Be SPICE to the MEMS world • Challenges • Must be fast enough for design (not just verification) • Must handle coupled physical effects Netlist Analysis Results Solvers transient analysis uses mumps.net steady-state analysis param ox=0, oy =0, oz=0 System Assembly gap3dV2 p1 [b c D E] static analysis [l=100u w1=5u w2=5u gap=2u t1=0u t2=500u Device Models sensitivity analysiss V1=5 V2=12 ox=ox oy = oy oz=oz] Library MATLAB ™ Web User Interfaces M&MEMS: SUGAR on the Web SUGAR in action: • Hosted on Berkeley Millennium cluster • Requires only a web browser • Java required for 3D graphics • Used in Fall 2001 MEMS introduction course • Might use O(106) continuum finite elements • SUGAR system uses 2621 elements • Described with a few parameterized subnets Measurement feedback: Related work: • SPICE and related network simulators • ANSYS, ABAQUS, FEAP, other finite element codes • NODAS from CMU • Coventorware from Coventor Ongoing and future work: • More and better mechanical (and other) models • Contact detection and simulation • Exploiting sparsity and parallelism • Reduced-order modeling • Sensitivity analysis • Design synthesis and optimization • Improved numerical treatment of multi-scale multiphysics problems Figure courtesy R. Muller. KSJP15 • Optical measurement facilities provided by Muller’s Matisse group • Validate simulations by comparison to measured data • Use measurement to improve models