1. MEMSMicro-Electo-Mechanical Systems By: Kelly Grahmann Meen 3344

2. What is MEMS? • Micro-Electro-Mechanical Systems • is the integration of elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for making microscopic devices • Other Materials used in MEMS • Gallium Arsinide • Titanium Nickel • Piezoelectric Materials

3. How MEMS are made! • There are three main building blocks in MEMS • Deposition process • The ability to deposit thin films of material • Lithography • is typically the transfer of a pattern to a photosensitive material by selective exposure to a radiation source such as light • Etching Process • Wet etching where the material is dissolved when immersed in a chemical solution • Dry etching where the material is sputtered or dissolved using reactive ions or a vapor phase etchant

4. Pictures of MEMS

5. ExpectedCharacteristics of MEMS • In the future, MEMS Technology compared to Conventional Technology should have these effects: • Cost reduction • Increase functionality • Improve reliability • Decrease size • Decrease mass

6. References • http://www.pcmag.com/encyclopedia_term/0,2542,t=microelectromechanical+systems&i=46791,00.asp • http://www.stormingmedia.us/96/9694/A969424.html • http://www.swri.edu/3pubs/brochure/D64/MEMS/home.htm • http://www.smalltimes.com/document_display.cfm?document_id=1566 • http://www.memsnet.org/mems/what-is.html • http://www.wikipedia.org • http://www.thinfilmmfg.com/subscribers/Subscriber02/mems10Apr02.htm