1. The NICEWAY EXERCISE Dr. Peter EwenProf. Rebecca Cheung This is taken only by students doing MICROELECTRONICS 3

2. THE NICEWAY EXERCISE • PROCESS AND DEVICE SIMULATORS • IC FABRICATION PROCESSES • IMPORTANCE OF SIMULATIONS • THE NICEWAY EXERCISE

3. e.g. oxidation time, oxidation temperature, implant dose & energy INPUT PROCESS SIMULATOR DEVICE STRUCTURE DOPING DENSITIES ND gate field oxide concentration OUTPUT NA source drain depth

4. device structure, doping densities INPUT DEVICE SIMULATOR ELECTRICAL PROPERTIES IO • OUTPUT CHARACTERISTICS • BREAKDOWN VOLTAGE • THRESHOLD VOLTAGE • etc. OUTPUT VO

5. FABRICATION DETAILS PROCESS SIMULATOR device structure doping densities DEVICE SIMULATOR ELECTRICAL PROPERTIES

6. THE 4 MAIN IC FABRICATION PROCESSES SiO2 oxidation etching implantation diffusion silicon dopant ions            ~1000ºC

7. SYNOPSIS Inc. TSUPREM-4 – 2-D process simulator MEDICI – 2-D device simulator TAURUS WORKBENCH – file handling environment Customer list includes: Cray Research Xerox Corp. Motorola Honeywell National Semiconductor Signetics Texas Instruments RCA Tektronix Eaton Corp.

8. ADVANTAGES OF COMPUTER SIMULATION IN IC MANUFACTURE • LOW COST • SHORT DEVELOPMENT TIMES • (FOR DEVELOPING NEW PROCESSES • OR OPTIMIZING EXISTING ONES) • 3. YIELDS DETAILED INFORMATION

9. Approaching the $2bn factory Fabrication cost ($m) Source: Yoshio Nishi, Vice-president Texas Instruments Year

10. Device • structure • Structural • measurements • Doping • concentrations • Concentration • vs depth – 1-D • profile Al oxide poly-Si gate source drain

13. Electrical properties • Output • characteristics • (IDS vs VDS) • Gate characteristic • (ID vs VG - gives VT) • Breakdown voltage VT

14. Potential contours

15. THE NICEWAY EXERCISE • Three 3-hour lab sessions (starting in week 7) • location – Teaching Lab C (TLC) • Session 1: Introductory • exercise • Session 2: n-channel • MOS design exercise • Session 3: p-channel • CMOS design exercise

16. THE NICEWAY EXERCISE • PREPARATION • Read sections 1-4 of the manual before first • session. • Bring an exercise book to act as a lab-book (doesn’t have to be anything expensive, but not a loose-leaf binder). • There is a preparation sheet for session 3 that must be handed in to EETO – see last page of handout.