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SEM- Schematic Overview

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SEM- Schematic Overview. Electron Detection. Tungsten Filament Electron Source. Filament Emission. Field Emission Gun. Magnetic Lenses. Focusing Optics. Effect of Working distance. Effect of Condenser Lense. Aberations to Minimum Spot Size.

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SEM- Schematic Overview

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Presentation Transcript

  1. SEM- Schematic Overview

  2. Electron Detection

  3. Tungsten Filament Electron Source

  4. Filament Emission

  5. Field Emission Gun

  6. Magnetic Lenses

  7. Focusing Optics

  8. Effect of Working distance

  9. Effect of Condenser Lense

  10. Aberations to Minimum Spot Size

  11. Voltage and Atomic Number Effect on Backscatter Electrons

  12. Monte Carlo Simulation and Secondary Electron Generation

  13. Electron- Atom Interaction

  14. X-ray Emission

  15. X-ray Generation

  16. Characteristic X-rays • Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5

  17. X-ray Transitions

  18. Energy Spectrum for Pure Ni

  19. Auger Electron Spectroscopy

  20. Energy Versus Penetration

  21. SEM Operational Components

  22. Line Scan Process

  23. Pixel Element and Sample area Scanned

  24. Effect of Working Distance and Aperture on Depth of Focus ( in m)

  25. Electron Detector and Electron Sources

  26. Non Dispersive X-ray Detection

  27. Non Dispersive Detector

  28. Multichannel Analyzer

  29. Super Alloy X-ray Spectrum

  30. Peak Broadening Due to Resolution of Si Detector

  31. X-ray Energies 1-10 KeV

  32. Mid Energy K and L Spectra

  33. Bi M and Cu Spectra

  34. Common Interfering X-ray Lines

  35. EDS Spectra of Glass

  36. Wavelength Dispersive X-ray Detector

  37. X-ray Detection Gas Proportional Counter Single Channel Pulse Height Detector

  38. Detector Output

  39. Wavelength Dispersive Spectra

  40. Comparison of EDS and WDS

  41. EDS Spectra of Glass

  42. WDS Spectra of High Z Glass

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