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Vacuum Research Solution Discussion

Vacuum Research Solution Discussion. ELL. F. Wide pipe. A. Pump. E. G. N 2. D. B. C. To a “J” shaped hook. narrow pipe. ELL Vacuum System. ELL block diagram. E. A. B. Process Chamber. C. F. D. G. H. Pump. Process chamber block diagram.

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Vacuum Research Solution Discussion

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  1. Vacuum Research Solution Discussion

  2. ELL F Wide pipe A Pump E G N2 D B C To a “J” shaped hook narrow pipe ELL Vacuum System ELL block diagram

  3. E A B Process Chamber C F D G H Pump Process chamber block diagram • It controls pressure by the butterfly valve H. It modulates the conductance of the pumping path by either open itself up to increase conductance or the opposite. Pmin = Qload/Seff, 1/Seff = 1/S+1/C. So conductance C can modulate Pmin through Seff. If pressure is too high it should open up H to increase conductance and effective pumping speed.

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