X-ray Tube

1. Monochromator Ge(440) or Ge(220) or Hybrid Sample  = 5’’ or 12’’ or 19’’ X-ray Tube Detector 2 2o Substrate Receiving Slit  = 0.5o Substrate Substrate X-ray Tube (point focus) Sample  0.3o Receiving Slit Detector Crossed Slit Collimator X-ray Tube (line focus) Sample Flat Graphite Monochromator X-ray Mirror  = 0.04o Parallel Plate Collimator  = 0.5o Perfect epitaxial layers AlGaAs/GaAs InGaAsP/InP SiGe/Si 2= 0.27o Divergence Slit High Resolution Medium Resolution Detector X-ray Tube (point focus) Sample Textured epitaxial layers CdTe/GaAs GaAs/Si High Tc Superconductors Flat Graphite Monochromator Monochromator Ge(440) or Ge(220) or Hybrid Sample  = 5’’ or 12’’ or 19’’ X-ray Tube 2 = 12’’  0.3o Parallel Plate Collimator Detector Channel-cut Ge(220) analyzer Substrate 2= 0.27o Crossed Slit Collimator  = 0.5o High Resolution Textured polycrystalline layers High Tc Superconductors PtSi/Si CoPd multilayers Low Resolution Detector Thinpolycrystalline and amorphous layers + random polycrystalline bulk samples Low Resolution