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Semiconductor Device Modeling and Characterization – EE5342 Lecture 6 – Spring 2011

Semiconductor Device Modeling and Characterization – EE5342 Lecture 6 – Spring 2011. Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/. First Assignment. e-mail to listserv@listserv.uta.edu In the body of the message include subscribe EE5342

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Semiconductor Device Modeling and Characterization – EE5342 Lecture 6 – Spring 2011

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  1. Semiconductor Device Modeling and Characterization – EE5342 Lecture 6 – Spring 2011 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/

  2. First Assignment • e-mail to listserv@listserv.uta.edu • In the body of the message include subscribe EE5342 • This will subscribe you to the EE5342 list. Will receive all EE5342 messages • If you have any questions, send to ronc@uta.edu, with EE5342 in subject line.

  3. Second Assignment • Submit a signed copy of the document that is posted at www.uta.edu/ee/COE%20Ethics%20Statement%20Fall%2007.pdf

  4. Drift Current • The drift current density (amp/cm2) is given by the point form of Ohm Law J = (nqmn+pqmp)(Exi+ Eyj+ Ezk), so J = (sn + sp)E =sE, where s = nqmn+pqmp defines the conductivity • The net current is

  5. Drift currentresistance • Given: a semiconductor resistor with length, l, and cross-section, A. What is the resistance? • As stated previously, the conductivity, s = nqmn + pqmp • So the resistivity, r = 1/s = 1/(nqmn + pqmp)

  6. Drift currentresistance (cont.) • Consequently, since R = rl/A R = (nqmn + pqmp)-1(l/A) • For n >> p, (an n-type extrinsic s/c) R = l/(nqmnA) • For p >> n, (a p-type extrinsic s/c) R = l/(pqmpA)

  7. Drift currentresistance (cont.) • Note: for an extrinsic semiconductor and multiple scattering mechanisms, since R = l/(nqmnA) or l/(pqmpA), and (mn or p total)-1 = Smi-1, then Rtotal = S Ri (series Rs) • The individual scattering mechanisms are: Lattice, ionized impurity, etc.

  8. Exp. mobility modelfunction for Si1 Parameter As P B mmin 52.2 68.5 44.9 mmax 1417 1414 470.5 Nref 9.68e16 9.20e16 2.23e17 a 0.680 0.711 0.719

  9. Exp. mobility modelfor P, As and B in Si

  10. Carrier mobilityfunctions (cont.) • The parameter mmax models 1/tlattice the thermal collision rate • The parameters mmin, Nref and a model 1/timpur the impurity collision rate • The function is approximately of the ideal theoretical form: 1/mtotal = 1/mthermal + 1/mimpurity

  11. Carrier mobilityfunctions (ex.) • Let Nd= 1.78E17/cm3 of phosphorous, so mmin = 68.5, mmax = 1414, Nref = 9.20e16 and a = 0.711. Thus mn = 586 cm2/V-s • Let Na= 5.62E17/cm3 of boron, so mmin = 44.9, mmax = 470.5, Nref = 9.68e16 and a = 0.680. Thus mn = 189 cm2/V-s

  12. Lattice mobility • The mlattice is the lattice scattering mobility due to thermal vibrations • Simple theory gives mlattice ~ T-3/2 • Experimentally mn,lattice ~ T-n where n = 2.42 for electrons and 2.2 for holes • Consequently, the model equation is mlattice(T) = mlattice(300)(T/300)-n

  13. Ionized impuritymobility function • The mimpur is the scattering mobility due to ionized impurities • Simple theory gives mimpur ~ T3/2/Nimpur • Consequently, the model equation is mimpur(T) = mimpur(300)(T/300)3/2

  14. Mobility Summary • The concept of mobility introduced as a response function to the electric field in establishing a drift current • Resistivity and conductivity defined • Model equation def for m(Nd,Na,T) • Resistivity models developed for extrinsic and compensated materials

  15. Net silicon (ex-trinsic) resistivity • Since r = s-1 = (nqmn + pqmp)-1 • The net conductivity can be obtained by using the model equation for the mobilities as functions of doping concentrations. • The model function gives agreement with the measured s(Nimpur)

  16. Net silicon extrresistivity (cont.)

  17. Net silicon extrresistivity (cont.) • Since r = (nqmn + pqmp)-1, and mn > mp, (m = qt/m*) we have rp > rn • Note that since 1.6(high conc.) < rp/rn < 3(low conc.), so 1.6(high conc.) < mn/mp < 3(low conc.)

  18. Net silicon (com-pensated) res. • For an n-type (n >> p) compensated semiconductor, r = (nqmn)-1 • But now n = N = Nd - Na, and the mobility must be considered to be determined by the total ionized impurity scattering Nd + Na= NI • Consequently, a good estimate is r = (nqmn)-1 = [Nqmn(NI)]-1

  19. Equipartitiontheorem • The thermodynamic energy per degree of freedom is kT/2 Consequently,

  20. Carrier velocitysaturation1 • The mobility relationship v = mE is limited to “low” fields • v < vth = (3kT/m*)1/2 defines “low” • v = moE[1+(E/Ec)b]-1/b, mo = v1/Ec for Si parameter electrons holes v1 (cm/s) 1.53E9 T-0.87 1.62E8 T-0.52 Ec (V/cm) 1.01 T1.55 1.24 T1.68 b 2.57E-2 T0.66 0.46 T0.17

  21. vdrift[cm/s]vs. E [V/cm](Sze2, fig. 29a)

  22. References • *Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. • **Semiconductor Physics & Devices, by Donald A. Neamen, 2nd ed., Irwin, Chicago. • M&K = Device Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. • 1Device Electronics for Integrated Circuits, 2 ed., by Muller and Kamins, Wiley, New York, 1986. • 2Physics of Semiconductor Devices, by S. M. Sze, Wiley, New York, 1981.

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