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News from CMS Process Quality Control

News from CMS Process Quality Control. Thomas Bergauer HEPHY Vienna. CMS TK Week, 29.1.2003, CERN. Centers. Three Process Qualification Centers:. Florence Anna Macchiolo Carlo Civinini Mirko Brianzi. Strasbourg Jean-Charles Fontaine Jean-Marie Helleboid Jean-Laurent Agram. Vienna

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News from CMS Process Quality Control

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  1. News from CMS Process Quality Control Thomas Bergauer HEPHY Vienna CMS TK Week, 29.1.2003, CERN

  2. Centers • Three Process Qualification Centers: Florence Anna Macchiolo Carlo Civinini Mirko Brianzi Strasbourg Jean-Charles Fontaine Jean-Marie Helleboid Jean-Laurent Agram Vienna Thomas Bergauer Margit Oberegger Characterization by QTC Process stability on test structures with 9 different measurements Thomas Bergauer, HEPHY Vienna

  3. CVmos at different temperatures • Just a test (Vienna coolingbox was available) • CVmos at 5 different temperatures • CVmos chosen because it is the simplest measurement • No temperature dependence of Vfb Thomas Bergauer, HEPHY Vienna

  4. Thicker Aluminium • 39 Teststructures from PQC Florence • Perugia 12 (prod.week 34/02) • Perugia 13 (03/02) • Perugia 14 (06/02 and 23/02) • Pisa 59 (08/02) • Pisa 60 (24/02) Influence to rho_Alu after Before week 20/02 • Average data: • before Week 20/02: • 26,09mOhms/sq. • After week 20/02: • 14,34mOhms/sq. • Also: slightly lower C_ac value: • 17,01pF (before week 20/02) -> • 16,65pF (after) Thomas Bergauer, HEPHY Vienna

  5. Mask Problem W7B • Misalignment of 3 structures at the standard half moon • Not able to contact with probecard in one cycle • W7B: 1440 pcs. Cac R (Al, p+, poly) Ivgcd Cint IVbaby Rint CVdiode CVMOS & IV diel Thomas Bergauer, HEPHY Vienna

  6. Mask Problem W7B • 3 structures on the standard half moon affected • Sensor mask is OK • Options: • new probecard design OR • new wafer mask design GCD C_int Thomas Bergauer, HEPHY Vienna

  7. Inter-calibration • Circulation of 5 Teststructures • Vienna -> Strasbourg • Strasbourg -> Florence • Florence -> Vienna -> Florence -> Vienna -> Strasbourg (Exchange of TS during this Tracker Week) • Results: (up to now) • Good agreement in all measurements • Higher Leakage current of Vienna Probecard causes lower R_int and higher IV_dielectric and GCD problems (fit) • small differences in capacitances values caused by stray capacitances. (<1pF) Thomas Bergauer, HEPHY Vienna

  8. Software • New Software allows re-read of local files • Up to now: Stand-alone program • Re-analyze • Re-write XML file Acquisition Analysis DB Interface Main: Local files Analysis DB Interface new: • Future: • Fully integrated into acquisition software Acquisition Analysis DB Interface Local files Thomas Bergauer, HEPHY Vienna

  9. Database • 322 teststructures successfully loaded into db • 61 faulty • (status: 28.1.03) Thomas Bergauer, HEPHY Vienna

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