1 / 35

나노 기술

나노 기술. 기능성 산화물 박막 기술 Scanning Probe Microscope. 2002년 5월 23일 송태권. 참고 자료. 나노연구소 http://designwith.net/nano/?t=home Handbook of Nanostructured Materials and Nanotechnology. Nano?. Macro vs . Micro. Nano vs . Micro. Two ways in Nanotech. New function in nano-scale Not just size

kaylana
Télécharger la présentation

나노 기술

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 나노 기술 기능성 산화물 박막 기술 Scanning Probe Microscope 2002년 5월 23일 송태권

  2. 참고 자료 • 나노연구소 http://designwith.net/nano/?t=home • Handbook of Nanostructured Materials and Nanotechnology

  3. Nano? Macro vs. Micro

  4. Nano vs. Micro

  5. Two ways in Nanotech. • New function in nano-scale Not just size • Bottom-up • Nanotube, Semiconductor Quantum Dots • Top-down • Nanoparticles, Nano-sized powders

  6. Gate Oxide/Memory Capacitor

  7. MEMS or NEMS (Nano-Electro-Machining System)

  8. Metal Oxide Thin Films

  9. Perovskites Ferroelectric Optical Magnetic Conductive High TC Superconductive Transition Metal Oxides ; Multi-valence

  10. Ferroelectric • Ti, Zr, Nb, Ta Oxides • BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12, La-Bi4Ti3O12, SrBi2Ta2O9 • DRAM • FRAM(Ferroelectric RAM) • IR detector

  11. DRAM Application • High Density → Small Area → Complex Structure → High e

  12. Optical • Nb, Ta Oxides • LiNbO3, LiTaO3 • SAW (Surface Acoustic Wave) • Non-linear Optics • Optoelectronics

  13. Magnetic • Mn, Co, Fe Oxides • (La,Sr)MnO3 • Magnetic Head (CMR) • Magnetic Memory (MRAM) • Spintronics

  14. Conductive • Cu, Co, Ti Oxides • (La,Sr)CoO3 • Interconnect

  15. HTSC(High TC Superconductive) • Cu Oxides • YBa2Cu3O7-d • Joshephson Junction • SQUID • Bolometer

  16. Detailed Topics Oxygen Vacancy Reduction Multifunctional Devices Oxygen Vacancy Reduction Multilayer Films Oxide Superlattices High Density Devices Nano-Technology Strain Control

  17. Schematic of a FIOH Transparent Electrode (ITO) Pyroelectric (BSN, PLZT) Ferroelectric (BT, PZT) CMR Material (LSMO, LCMO) Oxide Substrate Photon; hn Monolithic Oxide Integrated Circuit Light hn Pyroelectric DP (DT) Ferroelectric DP (DT) CMR Material DR Data Storage Retrieving Data Signal Sensing & Transformation

  18. GMR vs. CMR • Giant Magneto-Resistance • in Magnetic Metal Multilayers(Superlattices) • Colossal Magneto-Resistance • in Magnetic Oxides

  19. Applications of Ferroelectric Thin Films

  20. Thin Film Deposition • PVD (Physical Vapor Deposition) • PLD (Pulsed Laser Deposition) • Sputtering • CVD (Chemical Vapor Deposition) • MOCVD • Sol-gel

  21. Pulsed Laser Deposition

  22. Ion Substitution Effects

  23. Strain Effects

  24. Scanning Probe Microscope • STM (Scanning Tunneling Microscope)

  25. Piezo-Micro-Manipulator

  26. AFM (Atomic Force Microscope) • Non-conductive Materials like Dielectrics • In Air → Easy to Use

  27. SCM (~ Capacitance ~) • Resonance Frequency

  28. Applications of SCM - I • Semiconductor MOSFET

  29. Applications of SCM - II • Memory Application

  30. EFM(Electric Force Microscope)

  31. EFM – Ferroelectric Domain

  32. MFM(Magnetic Force Microscope)

  33. MFM-Hard Disk Surface

More Related