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Pre Aligners- Wafer Aligner Field Proven In HVM Operations

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kensingtonlabs
10 diapositives · 139 Views · Jul 25, 2019

Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand-alone units as well as integrated directly into robots.

#Wafer Pre Aligner #wafer handling #Wafer Robot #Stage Repair
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  1. Pre Aligners- Wafer Aligner Field Proven In HVM Operations

  2. About us Kensington’s Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand alone units as well as integrated directly into robots. The alignment technology is used for opaque as well as transparent materials and the wafer aligner supports substrates that are not round. Pre Aligners are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

  3. Pre-Aligners Both integrated and external pre-aligners use transmissive sensors located within the pre-aligner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.

  4. External Our external pre-aligner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.

  5. External Small Wafer Our external small wafer pre-aligner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability.

  6. Integrated The integrated pre-aligner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and pre-aligner system and maximizing cleanliness, accuracy, and reliability.

  7. Features • Rotational Accuracy < 2 arc sec • Centration Accuracy < 0.002” (0.051 mm) • Supports Transparent Substrates • Glass and Quartz • Plastic • SiC • Throughput of up to 450 WPH • Accurately measures location and orientation in a single rotation for high throughput • All combinations of SEMI standard wafers are supported • Station Self Teach Functionality

  8. Options • Small wafers: 50 mm to 100 mm • Transparent Substrates • Thin Wafer • Edge Grip • Crown/Taiko Wafers

  9. Standard Configurations

  10. CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800