Innovative MOEMS Using Tethered Liquid Drops for Enhanced Actuation and Motion Control

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This study explores advancements in MicroOptoElectroMechanical Systems (MOEMS) utilizing tethered liquid drops to overcome the limitations of traditional deformable structures. Conventional designs with spindly linkages can be thermally insulating, whereas tethered drops enable effective electrical and thermal conduction while providing restoring forces for mirrors. Achievements include 0.75 volts at 300Hz actuation with 35mm displacement, precision dispensing of mercury drops, and successful self-alignment of mirrors. This technique paves the way for applications such as variable reflection displays and RF switches, leveraging the advantages of liquid mechanics.

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Apr 28, 2026

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Innovative MOEMS Using Tethered Liquid Drops for Enhanced Actuation and Motion Control

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MicroOptoElectroMechanical Systems (MOEMS) Investigators: A. Feinerman, ECE; C. Megaridis, MIE Prime Grant Support: NASA, and DARPA • Standard deformable structures rely on spindly linkages to achieve the flexibility required for motion. • Spindly structures are thermal insulators. • Tethered liquid drops provide electrical, and thermal conduction, as well as a restoring force/torque to mirror. 75 volts @ 300Hz with 35 mm actuation • tethered drops are super-deformable, large displacements at low voltages are possible • drops can be tethered by patterning the wetting properties of a surface • precision dispensing of Hg drops • self-alignment of ~50 mg mirrors. • Achieved reproducible piston motion • Achieved reproducible rotation • Used technique to make variable reflection display • Developing RF switch – liquids do not suffer from stiction.