Soft Lithography: Micro- and Nano-Fabrication Techniques
DESCRIPTION
Introduction to soft lithography for micro- and nano-fabrication using poly(dimethylsiloxane) stamps, including microcontact printing, replica molding, and other innovative methods discussed in Xia and Whitesides' 1998 paper.
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Soft Lithography: Micro- and Nano-Fabrication Techniques
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Presentation Transcript
Soft Lithography Xia, Y.; Whitesides, G. M. Angew. Chem. Int. Ed.1998, 37, 550-575.
Soft Lithography A group of non-lithographic techniques for micro- and nano-fabrication using a soft elastomeric stamp. poly(dimethylsiloxane)
RM- replica molding SAMIM- solvent assisted microcontact molding
µTM – microtransfer molding MIMIC –micromolding in capillaries
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