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2. INTRODUCTION INTEREST IN HIGHER PRECISION MANUFACTURING ACTIVITIES
PROBLEM WITH SMALLER TOOLS
APPLICATION ON BRITTLE MATERIALS
A PHYSICAL PROCESS 
3. ABOUTTHE MACHINING SYSTEM 
4. PROBLEMSWITH ULTRSONIC MACHININGAND SOLUTION 
5. (A)TOOL BREAKAGE TOOL MATERIAL-WC
COMPRESSIVE BREAKING LOAD=12N
BUCKLING LOAD=0.42N
d=50?m 
OPTIMUM MACHINING PRESSURE=10mN
TOOL SHOULD BE APPLIED CORRECTLY FOR NO FRACTURE
 
6. TOOL WEAR CAN BE AVOIDED BY TOOL ROTATION
IF TOOL ROTATION IS ECCENTRIC:
       -CAUSES PARTIAL CONTACT WITH WORKPIECE
        -UNDESIRABLE FORCE IN TOOL RADIAL DIRECTION 
7. (B)MECHANISM OF APPLYINGMACHINING PRESSURE MECHANISMS FOR MACHINING FORCE APPLICATION IN CONVENTIONAL SYSTEM:
           1.HYDRAULIC HEAVY BOB MECHANISM
                    -VIBRATION HEAD IS FIXED
                    -USED IN SMALL MACHINES
                    -APPLICATION OF UPWARD                                                         
                     PRESSURE TO WORKPIECE 
                     TABLE BY HYDRAULIC CYLINDER
           2.PARALLEL BALANCE HEAVY BOB MECHANISM
                   -VIBRATION HEAD IS BALANCED BY 
                    BALANCING MECHANISM
                   -USED IN LARGE MACHINING SYSTEM
                   -MACHINING PRESSURE IS APPLIED BY THE BOB
                                 
8. MINIMUM SETTABLE MACHINING FORCE
        -INCREASES DUE TO 
              >BACKLASH OF MOVING PARTS
              >SLIDING FRICTION
       -IT EXCEEDS THE BUCKLING LOAD
USE OF DYNAMOMETER
       -FOR CONSTANT MONITORING OF 
         MACHINING FORCE
USE OF NC FINE INFEED MECHANISM
       -TO CONTROL AMOUNT OF INFEED OF THE 
         VIBRATION HEAD 
9. (C)SUPPLY OF ABRASIVE PARTICLES ONE LAYER OF ABRASIVE PARTICLES IS MUST
AIR BUBBLES DUE TO CAVITATION:
      -DIAMETER BECOMES SIGNIFICANT 
       FOR SMALL DIAMETER TOOL
      -AFFECTS MACHINING
TOOL ROTATION 
10. MICRO ULTRASONIC ABRASIVE MACHINING SYSTEM 
12. (A)AEROSTATIC ULTRASONIC VIBRATION SPINDLE(VIBRATION HEAD) 
13. FED VERTICALLY BY SLIDING TABLE(Z-AXIS)
DRIVEN BY BALL SCREWS AND AN AC SERVOMETER
SUPPORTED BY AEROSTATIC BEARING
OPTICAL NON CONTACT DISPLACEMENT METER TO MEASURE VIBRATION CHARACTERISTICS AT THE TIP OF HONE
MOTION CONTROLLER-DMC1000,GALIL
         -A PC BASED MOTION CONTROLLER
         -TO CONTROL 3AXIS SIMULTANEOUSLY 
14. (B)MACHINING PRESSURE CONTROL DYNAMOMETER
     -ATTACHED TO XY-STAGE
     -CONTROL TOOL INFEED NUMERICALLY USING THE COMPUTER
     -MAINTAIN A CONSTANT MACHINING 
      FORCE
PIEZOELECTRIC DYNAMOMETER IS FOR MINIMUM SET MACHINING FORCE OF 10mN OR LARGER
 
     
15. WHEN MINIMUM SET MACHINING FORCE IS LESS THAN 10mN:
       -INACCURACY IN MEASUREMENT COMES    DUE TO DRIFT AND NOISE
       -A DOUBLE BEAM STRAIN GAUGE DYNAMOMETER IS USED
MACHINING FORCE WAS MEASURED EVERY 10mS AT TOTAL OF 50 TIMES,AND AVERAGE OF THESE MEASUREMENTS WAS USED FOR MACHINING PRESSURE CONTROL 
16. (C)ON –MACHINE SHAPING OF SMALL DIAMETER TOOL TO GRIND FACE OF THE TOOL
A DIAMOND WHEEL IS USED
TORSIONAL ULTRASONIC VIBRATION
       -TO REDUCE GRINDING FORCE
LANGEVIN TYPE VIBRATOR
       -GENERATE TORSIONAL VIBRATION
HONE AND CONE AMPLIFY VIBRATION 
17. MACHININGEXPERIMENT 
18. (A)EXPERIMENTAL PROCEDURE DYNAMOMETER WAS INSTALLED ON XY-STAGE
TRAY WAS FITTED ON DYNAMOMETER
GLASS WORKPIECE WITH SiC SLURRY WAS PUT ON THE TRAY AND MACHINED
SLURRY PREPARATION:
     -CENTRIFUGAL MIXING AND DEFOAMING SYSTEM WAS USED
SLURRY WAS AGITATED BY AERATING THE SLURRY IN THE MACHINING AREA PERIODICALLY USING A SUPERFINE NOZZLE 
19. (B)DRILLING PROCESS POINT OF CONTACT WAS DETERMINED
ABRASUVE SLURRY WAS FLOWN INTO THEMACHINING AREA AND CONSTANT PRESSURE MACHINING WAS DONE
TOOL WAS THEN ROTATED
VIBRATIONAL AMPLITUDE=15?m 
    ABRASIVE PARTICLE SIZE=8?m 
        SO,A SINGLE LAYER OF ABRASIVE PARTCLES WAS LIKELY TO BE PRESENT BETWEEN THE TOOL AND WORKPIECE ALL THE TIMES 
20. (C)INFLUENCE OF TOOL DIAMETER MICRO TOOLS OF 80,160,470 AND    730?m DIAMETER WERE PREPARED
MACHINING SPEED OF SMALLER TOOL IS LOWER
TOOL WEAR IS LONG FOR 80?m  TOOL
ABRASIVE PARTICLES GET REPELLED TOWARDS TOOL SIDES
         -PREVENT EFFECTIVE MACHINING
         -WEAR INCREASED
         -MACHINING SPEED DECREASED
SO FURTHER INVESTIGATION IS REQUIRED FOR SELECTION OF APPROPRIATE ABRASIVE PARTICLE SIZE 
22. (D)EFFECT OF TOOL ROTATION RISE IS LEFT AT CENTRE OF HOLE
PROTRUSION IS NOT FOUND FOR SMALLER TOOLS
      -BECAUSE OF WEAR AT TOOL TIP
FOR LARGER TOOL PROTRUSION HEIGHT INCREASES WITH TIME
BY TOOL ROTATION:
      -PROTRUSION HEIGHT REDUCED
      -RATE OF INCREASE REDUCED
WHEN ROTATION SPEED=1000rpm,PROTRUSION HEIGHT REMAINED VIRTUALLY CONSTANT
IMPROVED MACHINING SPEED 
23. APPLICATIONS MANUFACTURING OF ACEMENTED CARBIDE TOOL OF EXTREMELY SMALL DIAMETER BY WIRE EDM, WHICH HAS BEEN USED TO DRILL AHOLE OF 5?m IN DIAMETER IN SILICA GLASS AND SILICON
IN OPTOELECTRICAL DEVICES OR MICRO-ELECTRO MECHANICAL SYSTEM
TO MACHINE ANY MICROSIZED HOLES, APERTURES,ETC. 
24. ADVANTAGES ANY MICRO SIZED COMPONENTS CAN BE MACHINED
BRITTLE MATERIAL CAN BE MACHINED
A PHYSICAL PROCESS
PROVISION FOR ON MACHINE SHAPING SYSTEM 
25. DISADVANTAGES DIFFICULTY IN SMALL DIAMETER TOOL MANUFACTURING
FOR SMALLER TOOL MACHINING SPEED BECOMES WORSE AND TOOL WEAR INCREASES
          -CAN BE OVERCOME BY TOOL ROTATION
MAINTAINING ADEQUATE SUPPLY OF ABRASIVE PARTICLE BETWEEN TOOL AND WORKPIECE IS DIFFICULT
A COSTLY AFFAIR 
26. CONCLUSION MACHINING SPEED BECOMES AND TOOL WEAR INCREASES FOR A SMALLER TOOL
PROTRUSION HEIGHT IS MORE FOR 730?m TOOL,AND IT INCREASES WITH TIME
BY TOOL ROTATION PROTRUSION HEIGHT AND RATE OF INCREASE CAN BE REDUCED
AT ROTATION OF 1000rpm,PROTRUSION HEIGHT WAS REDUCED TO HALF THE ORIGINAL,AND IT REMAINED VIRTUALLY CONSTANT WITH MACHINING TIME
TOOL ROTATION APPROXIMATELY DOUBLED THE MACHINING SPEED,AND IT DID NOT DECREASE OVER TIME