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Rifat Kangi Bled , Slovenia - 12.04.2012

Dynamic reference vacuum system for calibration and characterization of Quadrupole Mass Spectrometers TUBITAK UME. Rifat Kangi Bled , Slovenia - 12.04.2012. Dynamic Reference Vacuum System. Mass Flow: Variable Leak Valve Orifice. Orifice Method. Throughput Method. Mass Flow: - MFC.

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Rifat Kangi Bled , Slovenia - 12.04.2012

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  1. Dynamic reference vacuum system for calibration and characterization of Quadrupole Mass Spectrometers TUBITAK UME Rifat KangiBled, Slovenia-12.04.2012

  2. Dynamic Reference Vacuum System

  3. Mass Flow: • Variable Leak Valve • Orifice Orifice Method Throughput Method Mass Flow: - MFC

  4. System design information and examination (ISO 21360, 5302, 27892)

  5. Dynamic Reference Vacuum System

  6. Single Chamber System Throughput Method

  7. Double Chamber System Orifice Method

  8. Dynamic Reference Vacuum System

  9. Mass flow traceability chain needed in the future Sonic Nozzle Under Establishment: [>110-2mbar.L/s] ± 0.2 % The MFC system is not enough to cover the mass flow traceability chain necessary in the vacuum metrology field. Must design and build other mass flow standard in UME. CVFM ± 2 % CPFM ± 5 % OrificeMethod

  10. System can be usedfor • Gas Flow Measurement [Q=C×∆P] (Double Chamber System) • TMP Evaluation (High Vacuum Pumps) • Scroll Pump Evaluation (Low Vacuum Pump) • Mass Flow Rate Measurement [dP/dt] at Constant Volume Chamber • System can be improved to continuous expansion system • QMS Evaluation

  11. Long Term Stability Results of Leak Valve

  12. Long Term Stability Results of Leak Valve

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