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BioRad Sputter Coater

BioRad Sputter Coater. Instructions for gold coating a SEM sample. NO, it’s not your eyes. This image is out of focus. Overview. Step 1 -- Argon On. Check to see if the Argon tank (bottle) main valve is on. Do NOT turn the pressure adjust needle valve on the regulator.

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BioRad Sputter Coater

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  1. BioRad Sputter Coater • Instructions for gold coating a SEM sample. • NO, it’s not your eyes. This image is out of focus

  2. Overview

  3. Step 1 -- Argon On • Check to see if the Argon tank (bottle) main valve is on. • Do NOT turn the pressure adjust needle valve on the regulator.

  4. Vent Specimen Chamber • Normally the specimen chamber is left under vacuum. • Turn on Power (red button illuminates) • Press Vent button (illuminates) • Allow 30 seconds or so for the chamber to vent • Press the Vent button again after chamber is vented

  5. Vent Chamber #2

  6. Open Sample Chamber • Open chamber by lifting the Target Assembly. Do not place your fingers on the target.

  7. Place samples in chamber • Load samples on stage • Close Chamber top making sure that the top is seated properly on the glass jar. • DO NOT DROP THE TOP.

  8. Pump chamber • Press Pump button (illuminates) • Let chamber pump down to 2 – 4 10-1 mbar. Then press Pump button (light out). • Press Vent button (illuminates). This will purge the chamber of air. The press Vent button again (light out). • Press Pump button (illuminates) and pump down. Chamber pressure should reach 6 – 8 x 10-2 mbar. This takes about 15 minutes.

  9. SETUP FOR SPUTTERING • Chamber pressure should reach 6 – 8 x 10-2 mbar. • INT/LOCK – SET HT Button should be illuminated. • Press the FTM – TIMER Button (illuminates); sputtering is done by time; FTM does not work.

  10. LEAK ARGON • Press the LEAK BUTTON (illuminates) – DO NOT ADJUST THE LEAK VALVE • The pressure in the chamber should spike and then drop back down to about 8 10-2 mbar.

  11. Sputter Gold -- 1 • Set the time on 30 sec. • Press the start button on the timer unit. • Slowly increase the kV (turn the knob)until the Plasma current is about 25 mA. The kV knob will be at about the 1 o’clock position.

  12. Sputter to desired thickness • Reset the timer to the desired time. This will vary depending upon the thickness of the coating that you want. Try 60 seconds for a start. • Remember that you can always put more on but it doesn’t come off very easy. • Recommend that you try very light coating and build up to your needed thickness. This is a trial and error process.

  13. Take Out the Samples • Turn the kV knob to zero • Press the LEAK Button (light out) • Press PUMP button (light out) • Press VENT button (illuminates) • Let the chamber vent (takes about 30 seconds) • Open chamber top and remove samples.

  14. Shut down • Close top (target assembly) making sure it is seated properly • Press VENT button (light out) • Press PUMP button • Turn off valve on top of Argon bottle • Press POWER Button (light out) • Sign In/Out

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