ITRS Public Conference Emerging Research Devices

1. ITRS Public ConferenceEmerging Research Devices 2012 ERD Chapter An Chen, Victor Zhirnov and Jim Hutchby

2. Emerging Research Devices Working Group • Hiro Akinaga AIST • Tetsuya Asai Hokkaido U. • Yuji Awano Keio U. • George Bourianoff Intel • Michel Brillouet CEA/LETI • John Carruthers PSU • Ralph Cavin SRC • Chorn-Ping Chang AMAT • An Chen GLFOUNDRIES • U-In Chung Samsung • Byung Jin Cho KAIST • Sung Woong Chung Hynix • Luigi Colombo TI • Shamik Das Mitre • Antoine Khoueir Seagate • Bob Doering TI • Tetsua Endoh Tohoku U. • Bob Fontana IBM • Paul Franzon NCSU • Akira Fujiwara NTT • Mike Garner Consultant • Dan Hammerstrom PSU • Wilfried Haensch IBM • Tsuyoshi Hasegawa NIMS • Shigenori Hayashi Matsushita • Dan Herr SRC • Toshiro Hiramoto U. Tokyo • Matsuo Hidaka ISTEK • Jim Hutchby SRC • Adrian Ionescu EPFL • Kiyoshi Kawabata Renesas Tech • Seiichiro Kawamura Selete • Suhwan Kim Seoul Nation U • Hyoungjoon Kim Samsung • Atsuhiro Kinoshita Toshiba • Dae-Hong Ko Yonsei U. • Hiroshi Kotaki Sharp • Mark Kryder INSIC • Franz Kreupl Tech. U. Munich • Zoran Krivokapic GLOBALFOUNDRIES • Kee-Won Kwon Seong Kyun Kwan U. • Jong-Ho Lee Hanyang U. • Thomas Liew ASTAR DSI • Lou Lome IDA • Matthew Marinella SNL • Hiroshi Mizuta U. Southampton • Kwok Ng SRC • Fumiyuki Nihei NEC • Dmitri Nikonov Intel • Kei NodaKyoto U. • Ferdinand Peper NICT • Er-Xuan Ping AMAT • Yaw Obeng NIST • Yutaka Ohno Nagoya U. • Dave Roberts Nantero • Shintaro Sato Fujitsu Labs • Barry Schechtman INSIC • Sadas Shankar Intel • Takahiro Shinada Waseda U. • Masayuki Shirane U. Tokyo • Kaushal Singh AMAT • Satoshi Sugahara Tokyo Tech • Shin-ichi Takagi U. Tokyo • Ken Uchida Toshiba • Thomas Vogelsang Rambus • Yasuo Wada Toyo U. • Rainer Waser RWTH A • Franz Widershoven NXP • Jeff Welser NRI/IBM • Philip Wong Stanford U. • Dirk Wouters IMEC • Kojiro Yagami Sony • David Yeh SRC/TI • Hiroaki Yoda Toshiba • In-K Yoo SAIT • Victor Zhirnov SRC

3. Evolution of Extended CMOS Elements Existing technologies More Than Moore New technologies Beyond CMOS year

4. 2012 ERD Chapter • Assessing Emerging Research -- • Memory Devices • Logic Devices • More-than-Moore Devices • Architectures • Benchmarking Emerging Devices

5. Key Messages • Emerging Research Memory: • Remove Nanomechanical Memory from ERD technology table • Recommend close tracking of RRAM by PIDS • Workshops on Memory Select Devices and Storage Class Memory completed • Quantitative data for roadmapping • Implement multilevel energy analysis for different memory technologies • Emerging Research Logic: • Planned logic device workshop for maturity evaluation (Sep. 21) • Recommend close tracking of p-III-V, n-Ge, nanowire FET, TFET by PIDS • Add emerging interconnect discussions in ERD • Together with RFAMS, mapping ERD devices for analog/RF applications • More-than-Moore Section: • New entry will be added in – On-chip energy harvesting devices • Emerging Architectures: • Execute workshop on emerging research architectures (fundamental concepts) • Add emerging memory interface for Storage Class Memory

6. Cross-TWIG Interactions • Discussions with PIDS on emerging research memory and logic devices for close tracking of maturing technologies • RRAM • Nanowire FET, Tunnel FET, p-III-V, n-Ge • Formed a taskforce with RF/AMS for evaluation of ERD devices for RF/Analog application • Envisioned outcome: a parametrization table in ERD MtM section • Formed a taskforce with Interconnects for exploring emerging interconnects solutions for emerging research devices • Envisioned outcome: expanding ERD tables to include emerging interconnect solutions • Initiated discussion with Design and AP on exploring circuit design and application space for ERD

7. Workshop on assessment of options for emerging memory select devices Noorwijk, the Netherlands, April 22, 2012 Status: Completed and report finished Workshop on emerging architectures for storage class memory   Monterey, CA, July 8, 2012 Status: Completed Workshop on emerging research logic devices  Bordeaux, France, September 21, 2012 (ESSDERC-linked) Status: Agenda completed Workshop on emerging research architectures San Francisco, CA, Dec 8, 2012 (tentative) Status: TBD 2012 ERD Workshops

8. One Diode – One Resistor (1D1R) Memory Cell H-S. P. Wong – Stanford U.

9. Workshop presentations will be put on ITRS website Workshop results are summarized in a report (finished) Several take-away messages There are several categories of memory select devices depending on memory device type and applications e.g. RRAM or PCM; embedded vs. stand-alone ERD Storage Class Memory workshop in July 2012 reiterated the importance of select devices A theoretical exploration of a ‘selector-less’ memory cell needs to be performed Memory element with a build-in select element (e.g. a Schottky diode) Materials/structure optimization for both memory and select functions Materials and Devices modeling could provide an important insight Contact resistance is an important practical performance limit ERM/ERD contact resistance e-workshop being planned Select Device Workshop Outcome

10. Memory Hierarchy – Future Memory Challenge SCM NVM cost/gigabyte ~ $1 Source: Al Fazio (Intel)

11. NAND 100ms 10ms 1ms 4F2 F F DRAM 100ns 10ns 2 4 6 8 10 low co$t Storage-type vs. memory-type SCM Speed (Latency & Bandwidth) Storage-type uses Memory-type uses Read Latency Power! (Write) Endurance Cost/bit Cell size [F2] Source: G. Burr (IBM)

12. ERD Memory Candidates Pt Pt TiO2-x TiO2 3 nm oxidized reduced

13. Potential of Memory Candidates for SCM Applications ? ? ? ? ? ? ?

14. Device options for SCM Morning session

15. Architecture issues of SCM Afternoon session

16. Over 50 participants Workshop presentations will be put on ITRS website Workshop results will be summarized in a report Several take-away messages A comprehensive multilevel energy analysis of different memories is needed A follow-up ERD study is planned Flexible interfaces (device-independent) A new topic for emerging architecture 'Generic' memory specs may need some discussion/rationalization Some memory devices are unlikely candidates (e.g., FRAM, Macromolecular memory) SCM Workshop Outcome

17. ERD Logic Workshop

18. Summary • Emerging Research Memory: • Remove Nanomechanical Memory from ERD technology table • Recommend close tracking of RRAM by PIDS • Workshops on Memory Select Devices and Storage Class Memory completed • Quantitative data for roadmapping • Implement multilevel energy analysis for different memory technologies • Emerging Research Logic: • Planned logic device workshop for maturity evaluation (Sep. 21) • Recommend close tracking of p-III-V, n-Ge, nanowire FET, TFET by PIDS • Add emerging interconnect discussions in ERD • Together with RFAMS, mapping ERD devices for analog/RF applications • More-than-Moore Section: • New entry will be added in – On-chip energy harvesting devices • Emerging Architectures: • Execute workshop on emerging research architectures (fundamental concepts) • Add emerging memory interface for Storage Class Memory