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Taiwan Standards Committee Liaison Report

Taiwan Standards Committee Liaison Report. SEMI Taiwan April 2014. SEMI Taiwan Standards Committee. Established in 2003 Mission: Focus on interface of manufacturing tools, factory automation computers, purpose of transferring commands and data used during the manufacturing process.

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Taiwan Standards Committee Liaison Report

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  1. Taiwan Standards Committee Liaison Report SEMI Taiwan April 2014 Venue, Location, Date

  2. SEMI Taiwan Standards Committee Established in 2003 Mission: Focus on interface of manufacturing tools, factory automation computers, purpose of transferring commands and data used during the manufacturing process. Established in 2005 Mission: Focus on Environmental, Health, and Safety standards fulfilling the technical needs. New TF to LED and PV, 2011 April Established in 2008 Mission: Focus on standards for materials and equipment used in the manufacture andtest methods of TFT-LCD Established in 2011 Mission: Focus on standards for Testing and Middle-end process in the manufacture and test methods of 3DS-IC industry Established in 2009 Mission: Focus on standards for Cell Appearance and vibration Test Method in the manufacture and test methods of PV industry

  3. FPD Metrology TC

  4. Contents • Leadership • Current Committee Structure • Meeting Information • New SNARFs & TFOFs • Ballot Results • Upcoming Ballots • Task Force Update

  5. <Region> <Committee> Leadership of TC Co-Chair: Tzeng-Yow Lin-CMS/ITRI Co-Chair: Jia-Ming Liu-TDMDA Leadership Change of TF Leader: Fang Hui-Mei (Stepped Down) Leader: Jed Tai (E INK) New

  6. <Region> <Committee> FPD Committee Structure and Organization Chart Liaison L: YP Lan/ITRI L:DA Chang/Kingbird L:RJ Chuang/TDMDA L:Tony Chiu/CIPO TWN FPD TC C: Tzeng-Yow Lin-CMS/ITRI C: Jia-Ming Liu-TDMDA LCD Sub-Committee L:Kerson Wang-i-boson ACG TF (DISBANDED) L: Garfield Pan-AUO L:S.P. Wang-DTC/ITRI Touch Screen Panel TF L: Y.W. Fang-AUO L:S.Y. Chuo-CMS/ITRI Flexible Display TF <New> L:WangWen-Tung-ITRI e-Paper Displays TF L: Fang Hui-Mei (Prime View, New leader) L: Bor-Jiunn Wen-CMS/ITRI 3D Displays Metrology TF (DISBANDED) L: Wen-Chuan Tsai-AUO L: Bao-Jen Pong-CMS/ITRI L: Kuen Lee-EOL/ITRI

  7. <Region> <Committee> Committee Highlights : FPD Organization Chart (New) Liaison L: YP Lan/ITRI L:DA Chang/Kingbird L:RJ Chuang/TDMDA L:Tony Chiu/CIPO TWN FPD TC C: Tzeng-Yow Lin-CMS/ITRI C: Jia-Ming Liu-TDMDA LCD Sub-Committee L:Kerson Wang-i-boson Touch Screen Panel TF L: Y.W. Fang-AUO L:S.Y. Chuo-CMS/ITRI e-Paper Displays TF L: Fang Hui-Mei (Stepped Down) L: Jed Tai (E INK) New L: Bor-Jiunn Wen-CMS/ITRI Flexible Display TF L:Wang Wen-Tung-ITRI

  8. <Region> <Committee> FPD-Metrology Committee Meeting Information

  9. <Region> <Committee> New SNARFs and TFOFs None

  10. <Region> <Committee> Ballot Results

  11. <Region> <Committee> Upcoming Ballots NA

  12. <Region> <Committee> FPD Metrology- TF Update • e-Paper TF : focus on reflectance measurements for Electronic Paper Displays: Terminology & Measuring methods, including Incident illumination and measurement geometry. The draft #5533A Passed for A&R. • Touch Screed TF: Re-work the draft #5293C for next Cycle, 2014 • Flexible TF: Working on the SNARF for: New Standard: Test Methods for Flexibility Properties of Flexible Displays, but team members still have different opinions on this SNARF. So, will re-work. • ACG TF: Disbanded on Jan. 21, 2014 • 3D Display Metrology TF: Disbanded on Jan. 21, 2014

  13. PV TC

  14. Contents • Leadership • Current Committee Structure • Meeting Information • New SNARFs & TFOFs • Ballot Results • Upcoming Ballots • Task Force Update

  15. Leadership PV Committee Co-chair: B.N.Chuang-CMS/ITRI Co-chair: J.S. Chen-TeraSolar Co-chair: Ray Sung-UL TWN Leadership Change of TF TF: PV Wafer Measurement Method Leader: Dr. Samuine Chen (ITRI/CMS ,New leader) <Region> <Committee>

  16. PV Committee Structure and Organization Chart PV Committee C:B.N.Chuang-CMS/ITRI C:J.S. Chen-TeraSolar C:Ray Sung-UL TWN PV Package Performance TF L: C.C.Lin-PV Guider L: Bor –Tsuen Wang/National Pingtung Unviersity L: T.C. Wu-CMS/ITRI L: Ivan Chou/Delsolar L: K.T.Lee-King Design Organic PV and Dye Sensitized Solar Cell TF (OPV & DSSC) L: Der-Ray Huang/NDHU L: T.C. Wu – CMS/ITRI Building Integrated Photovoltaic (BIPV) Task Force TF L: C.C.Lin-PV Guider L: Der-Ray Huang/NDHU L: T.C. Wu-CMS/ITRI L: Ivan Chou/Delsolar L: K.T.Lee/King Design L: Kuang Han Ke/Gran System PV Wafer Measurement Method TF L: Dr. Samuine Chen/ITRI-CMS

  17. PV Committee Meeting Information

  18. New SNARFs & TFOFs • New PV Reliability Test Method Task Force

  19. Ballot Results • None

  20. Upcoming Ballot • None

  21. PV –TF Update • Package TF: SEMI Draft #5431:New Standards : Test Method for Performance Criteria of Photovoltaic (PV) Wafer, Cell, and Module Package in process. Doc 5431 draft may apply for approval to vote in 2014Q4 in order to simulate and consider the handling, process and transportation for pallet cartons of packaged cells indoors and outdoors, this draft will refer the guidelines of ISTA and SEMI Standards firstly, based on the specific scenario. Revised PV 38-0912 to add criteria. • BIPV TF: SEMI Draft # 5560 : New Standard : Classification of Building Integrated Photovoltaic (BIPV) in progress. Currently working on the category and terminology. • Wafer Measurement Method TF: SNARF for wafer crack detection method or carrier lifetime measurement method.

  22. PV –TF Update • DSSC&OPV TF: Documents in work are Doc# 5597-Voltage (I-V) Performance Measurement of Dye Sensitized Solar Cell (DSSC), Doc 5599-Spectrum Response (SR) Measurement of Dye, ensitized Solar Cell (DSSC), Doc 5598-Durability Test Method of Dye Sensitized Solar Cell (DSSC)

  23. 3DS IC TC

  24. NA 3DS-IC Committee Report - August 2011 Leadership • Committee Co-chairs • TK Ku (ITRI) • Wendy Chen (KYEC) • YS Lai (ASE)

  25. Contents • Leadership • Current Committee Structure • Meeting Information • New SNARFs & TFOFs • Ballot Results • Upcoming Ballots • Task Force Update

  26. NA 3DS-IC Committee Report - August 2011 Organization Chart Taiwan 3DS-IC Committee Chairs: • TK KU(ITRI) • Wendy Chen(KYEC) • YS Lai(ASE) Middle-end Process Task Force Leaders: Jerry Yang (SEMATECH) CC Chen (CMPUG TW) Erh Ho Chen (ITRI) Testing Task Force Leaders: TT Miau (ITRI) Roger Huang (ASE) Ming-Chin Tsai (KYEC)

  27. Committee Meeting Information <Region> <Committee>

  28. SEMI 3DS-IC Standards Activities - August 2012 SNARFs (Standards New Activity Report Form)

  29. NA 3DS-IC Committee Report - August 2011 3DS IC Testing TF Update • [5485] New Standards: Guide for Incoming/Outgoing Quality Control and Testing Flow for 3DS-IC Products • Summary: • 1. Removed one extra AOI typed in 5.1.9 • 2. Removed 6.2.3 X-ray inspection. à for cost consideration • 3. Revised 8.4 SCoS testing flow à added options for CoC and CoW into the flow.

  30. SEMI 3DS-IC Standards Activities Published Standards [1/2] • SEMI 3D6-0913, New Standard: Guide for CMP and Micro-bump Processes for Frontside Through Silicon Via (TSV) Integration • This Guide provides: • A generic middle-end process flow to define acceptable TSV and CMP quality criteria as well as to develop methodology and measuring procedures for micro-bump. • A criteria and common baselines of the middle-end process for related upstream and downstream manufacturers in fabricating 3DS-IC products.

  31. SEMI 3DS-IC Standards Activities Published Standards [2/2] • SEMI 3D7-0913, New Standard: Guide for Alignment Mark for 3DS-IC Process • Photo alignment mark configuration is the key to ensure consistent and precise alignment of layers, chips and wafers. • This Guide provides: • the alignment mark strategy for chip to chip, chip to wafer, and wafer to wafer stacking. • addresses the universal alignment mark where the outcome will be a feasible photo alignment standard. Originated by Taiwan 3DS-IC Middle End Process TF

  32. EHS TC <Region> <Committee>

  33. Contents • Leadership • Current Committee Structure • Meeting Information • New SNARFs & TFOFs • Ballot Results • Upcoming Ballots • Task Force Update

  34. Leadership of TC Co-Chair: Shuh-Woei Yu-SAHTECH Co-Chair: Fang-Ming Hsu-TSMC <Region> <Committee>

  35. EHS Committee Structure and Organization Chart TWN EHS TC C: Shuh-Woei Yu-SAHTECH C: Fang-Ming Hsu-TSMC FPD Safety Sub-Committee L:C.C. Huang -SAHTECH IC Equipment Safety TF L: Collin Shen-Mxic L: C.C. Huang-SAHTECH Equipment Safety TF L: Benny Chen-AUO L:Juo Cho-AUO L: Alice Lin-CMO Gas & Chemical Safety TF L: Benny Chen-AUO L: Heng Li Sue-SAHTECH L: Moony Lee-UMC Environmental Sustainability TF L: Tony. C.H. Lu-ITRI L: C.Y Hung-TSMC Seismic TF L:K.C. Tsai -NCREE L: J.S. Hwang-NCREE L: D.W. Sun-TSMC Accreditation Committee Under Process PV Safety TF L: Eddie Wu -Nexpw LE Safety TF L: Eric Lin-Epistar

  36. EHS Committee Meeting Information NA 3DS-IC Committee Report - August 2011

  37. New SNARF & TFOFs • None <Region> <Committee>

  38. Ballot Result • None <Region> <Committee>

  39. Upcoming Ballot • None <Region> <Committee>

  40. TF Update • Overall TF Update by Dr. C. C. Huang/SAHTECH. Dr. Huang updated the current industry issues in Taiwan such as Occupational Safety and Health Act’s impact on high-tech equipment safety： • Equipment and Mechanical appliances impact • Explosion-proof electrical impact • Fire Act impact on high-tech plant Fire protection system in MO chemical room should be followed (or should follow) by water reaction and flammable liquid requirements. It is still difficulty on Cleanroom fire protection. • SEMI Japan Energy-Saving Cooperation • Propose technical manual to explain assumption and derivation of S23 convection factors • Proposed tank N2 conversion factor • Agree on Japan’s suggestion to have the common view on the ECF ranking of N2 and CDA. It affects the equipment energy saving design. The Committee is going to work on this issue first. Will continue collecting related information of technical manual.  <Region> <Committee>

  41. TF Update • SEMI High-Tech Facility Committee Fire Protection task force is proposing the following issues. • Cleanroom exhaust system - multi-zone desmoke effectiveness validation • Cleanroom exhaust system - Subfab desmoke control effectiveness validation • Sprinkler system-subfab action verified • Local water mist protection verified • Very early smoke detection system location under wafer slab evaluation verified • Establish visualization safety expert system for HPM location  <Region> <Committee>

  42. TF Update • Action Item: • Dr. C. C. Huang/SAHTECH to work with Dr. Tsai/NCREE for Seismic Topics and feedback to SEMI NA and SEMI Japan. • Co-chairs recommended to form a working group to study the impact of Occupational Safety and Health Act on high-tech equipment safety. Assigned Dr. C. C. Huang as working group leader, invited Dr. Po-Wen Wu/UMC, Eric Lin/Epistar, Jean Yang/Innlux, Yee-Long Yi/AMAT, Representative/Siemens as team members to work on the said Act. Warmly invite Siemens to join this group to share EU regulations on risk management of process equipment. <Region> <Committee>

  43. SEMICONTaiwan 2014 Sustainable Manufacturing Forum September 03, 2014

  44. SEMICON Taiwan 2014 Sustainable Manufacturing Forum

  45. Total 8 topics

  46. 2014 Sustainable Manufacturing Forum Agenda

  47. Regional StaffContact Information

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