1. INTEGRATED CIRCUITS Dr. EsamYosry Lec. #9

2. NPN Transistor Fabrication • Introduction • NPN Fabrication-Simple Flow • AMI Bipolar Transistor Process • Bipolar Fabrication –Masking Layers • Typical Bipolar Resistor Technology

3. Introduction(Chip Fabrication Cycle)

4. NPN Transistor (BJT) Fabrication Example Emitter Base Collector

5. Bipolar Transistor

6. Bipolar Transistor Fabrication – Simple

7. AMI Bipolar Transistor Process The beginning wafer is a P-epitaxial layer On a P+ substrate that is oxidized. Oxide P-Epi Layer P+substrate

8. AMI Bipolar Transistor Process N-Tub Oxide P-Epi Layer N-Tub Collector Field Oxidation Field Oxide Field Oxide Field Oxide P-Epi Layer N-Tub Collector

9. AMI Bipolar Transistor Process P-Base Formation P-base Field Oxide Field Oxide P-Epi Layer N-Tub Collector P+ Contact Formation P-base Field Oxide Field Oxide P+ P-Epi Layer N-Tub Collector

10. AMI Bipolar Transistor Process N+ Emitter and Collector Contact Formation P-base Oxide Field Oxide Field Oxide N+ P+ N+ N+ P-Epi Layer N-Tub Collector Contact Apertures P-base Oxide Field Oxide Field Oxide N+ P+ N+ N+ P-Epi Layer N-Tub Collector

11. Bipolar Fabrication – Masking Layers

12. Typical Bipolar Resistor Technology P-Base Resistor Formation Field Oxide Field Oxide P+ P-base P+ N+ P-Epi Layer N-Tub P+ N+ Top view of The resistor

13. Thanks Many thanks to Prof. Hany Fikry and Prof WaelFikry for their useful materials that help me to prepare this presentation.