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Silicon Substrate

Silicon Substrate. Add nitride. Silicon Substrate. Add Poly0. Patterned Photoresist. Silicon Substrate. Patterning through 1st level mask (Poly0) using Photolithography. Photoresist. Patterned Photoresist. Silicon Substrate. Removal of Unwanted Poly0 using Reactive Ion Etching.

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Silicon Substrate

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  1. Silicon Substrate Add nitride

  2. Silicon Substrate Add Poly0

  3. Patterned Photoresist Silicon Substrate Patterning through 1st level mask (Poly0)using Photolithography Photoresist

  4. Patterned Photoresist Silicon Substrate Removal of Unwanted Poly0 using Reactive Ion Etching

  5. Silicon Substrate 1st Oxide Deposition using LPCVD

  6. Silicon Substrate Patterning through 2nd level mask (Dimple)using Photolithography... and Deep RIE Photoresist

  7. Silicon Substrate Patterning through 3rd level mask (Anchor)using Photolithography and Deep RIE Photoresist

  8. Silicon Substrate Blanket un-doped polysilicon deposition(Poly1) using LPCVD... followed by PSG deposition and annealing

  9. Silicon Substrate Patterning through 4th level mask (Poly1) using Photolithography... and Deep RIE Photoresist

  10. Silicon Substrate Deposition of 2nd Oxide Layer

  11. Silicon Substrate Patterning through 5th level mask using photolithography and deep RIE

  12. Silicon Substrate Patterning through 6th level mask using photolithography and deep RIE

  13. Silicon Substrate Deposition of undoped polysilicon, followed by PSG hardmask layer, then anneal

  14. Silicon Substrate Patterning through 7th level mask using photolithography and deep RIE

  15. Silicon Substrate Patterning through 8th level mask using photolithography and liftoff, followed by removal of unwanted resist and metal in solvent bath

  16. Release of structures using HF Silicon Substrate

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